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Toward Design and Implementation of Intelligent Manufacturing in Semiconductor Production Industry with Wafer Chamber Faults
In Mina Farmanbar, Maria Tzamtzi, Ajit Kumar Verma & Antorweep Chakravorty (eds.), Frontiers of Artificial Intelligence, Ethics, and Multidisciplinary Applications: 1st International Conference on Frontiers of AI, Ethics, and Multidisciplinary Applications (FAIEMA), Greece, 2023. Springer Nature Singapore. pp. 273-284 (2024)
Abstract
An intelligent manufacturing system, in semiconductor industry, is analyzed. The model of the system in the presence of faults related to the wafer chambers is derived in discrete event system form. An embedded fault detection AI mechanism is used to feed the controller with information regarding the presence of faults. The performance and the system properties of the controlled wafer manufacturing process are successfully investigated in the presence of faults. The supervisor controllers are implemented using parametric function blocks in ST language for PLCs.My notes
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